System with meshed power and signal buses on cell array

ABSTRACT

A method and apparatus for providing a meshed power and signal bus system on an array type integrated circuit that minimizes the size of the circuit. In a departure from the art, through-holes for the mesh system are placed in the cell array, as well as the peripheral circuits. The power and signal buses of the mesh system run in both vertical and horizontal directions across the array such that all the vertical buses lie in one metal layer, and all the horizontal buses lie in another metal layer. The buses of one layer are connected to the appropriate bus(es) of the other layer using through-holes located in the array. Once connected, the buses extend to the appropriate sense amplifier drivers. The method and apparatus are facilitated by an improved subdecoder circuit implementing a hierarchical word line structure.

CROSS REFERENCE

[0001] This is a Continuation of Ser. No. 10/315,307, filed Dec. 10,2002, which is a Continuation of Ser. No. 10/120,872, filed Apr. 11,2002, now issued U.S. Pat. No. 6,512,257; which is a Continuation ofSer. No. 09/909,191, filed Jul. 19, 2001, now issued U.S. Pat. No.6,396,088; which is a Continuation of Ser. No. 09/496,079, filed Feb. 1,2000, now issued U.S. Pat. No. 6,288,925; which is a Continuation ofSer. No. 09/330,579, filed Jun. 11, 1999, now issued U.S. Pat. No.6,069,813; which is a Continuation of Ser. No. 08/991,727, filed Dec.16, 1997, now issued U.S. Pat. No. 5,953,242; which is a Divisional ofSer. No. 08/728,447, filed Oct. 10, 1996, now issued U.S. Pat. No.6,115,279; which claims benefit of priority Provisional Serial No.60/005,502, filed Nov. 9, 1995.

FIELD OF THE INVENTION

[0002] The invention relates generally to semiconductor circuit designand, more particularly, to a method and apparatus for interconnectingpower and signal buses in an integrated circuit.

BACKGROUND OF THE INVENTION

[0003] As semiconductor technology develops, the number of transistorsincluded in a single integrated circuit, or “chip” is becoming largerand the design rule parameters therefore are becoming smaller. These twodevelopments contribute to increased metal layer resistance and todifficulties associated with this increased resistance. Suchdifficulties include ground bounce, cross talk noise, and circuitdelays. All of these difficulties slow down chip operation and may evencorrupt data stored on the chip. Eliminating the impact of increasedmetal layer resistance is an important design challenge in mostsemiconductor designs, including designs for dynamic random accessmemory (DRAM) devices.

[0004] One solution to this problem has been the development of a meshedpower bus system for the chip, as described in Yamada, A 64-Mb DRAM withMeshed Power Line, 26 IEEE Journal of Solid-State Circuits 11 (1991). Ameshed power bus system is readily implemented in integrated circuitslike DRAMs because of their large arrays of memory cells and thepresence of distributed sense amplifier drivers. The meshed systemsupplies adequate power to the distributed sense amplifier driversbecause the system has many power buses running in both horizontal andvertical directions across the arrays.

[0005] The Yamada meshed system may be implemented using a conventionalcomplimentary metal oxide semiconductor (CMOS) technology, includingfirst, second and third metal layers, each electrically isolated fromeach other, wherein the first metal layer represents the lowest metallayer, the third metal layer represents the upper-most metal layer, andthe second metal layer lies between the first and third layers. TheYamada meshed system is constructed in the second and third metal layerand includes a positive supply voltage (V_(DD)) mesh and a negativesupply voltage (V_(SS)) mesh, for the V_(DD) power buses and the V_(SS)power buses, respectively. Conventional designs have these meshesrunning over the memory array and connecting at the sense amplifiers.Connections are made using through-holes, located in the area of thesense amplifier circuits. However, the presence of V_(DD) and V_(SS)power buses in the sense amplifiers is unnecessary, since these circuitsdo not require either V_(DD) or V_(SS) power buses, except for wellbias.

[0006] As a result, the sense amplifiers, due to their relatively smallsize and numerous associated signal and power buses, are adverselyaffected by the Yamada meshed system. The Yamada meshed systemovercrowds the sense amplifiers with additional power and signal buses.In addition, the metal line width required for overlapping through-holesis larger than the minimum metal line width and therefore increases thewidth of the metal layers even further. As a result, the metal layerover the sense amplifiers becomes determinative of the size of the senseamplifier circuits. Accordingly, their size reduction must be realizedby tightening the metal width, inevitably resulting in increasedresistance and slower operation.

[0007] In addition to the Yamada meshed system, other proposals havebeen made for conventional DRAM design. Recently, a hierarchical wordline scheme was proposed in K. Noda et Al., a Boosted Dual Word-lineDecoding Scheme for 256 Mbit DRAM's, 1992 Symp. on VLSI Circuits Dig. ofTech. Papers, pp.112-113(1992). The Noda scheme includes main wordlines, constructed in the second metal line layer, and subword linesconstructed in a poly silicon layer. The Noda scheme describes two mainword lines (one true, one bar) for every eight subword lines, and isthereby able to relax the main word line pitch to four times that of thesubword line. However, this pitch would not support an improved meshedpower and signal bus system.

[0008] Consequently, there is a need for a meshed power and signal bussystem on an array-type integrated circuit that does not limit meshthrough-hole connections to the area of the sense amplifiers, butprovides for such connections at other locations on the array, therebyallowing for a relaxed metal width over the sense amplifiers and areduction of the overall area of the chip with lower power busresistance.

[0009] Furthermore, there is a need for a hierarchical word line schemethat supports an improved meshed power and signal bus system, that has amain word line pitch greater than four times that of the subword linepitch.

SUMMARY OF THE INVENTION

[0010] The present invention, accordingly, is a method and apparatus forproviding a meshed power bus and signal bus system on an array-typeintegrated circuit that does not limit mesh through-hole connections tothe area of the sense amplifiers, but provides for these connections atother locations on the array, thereby allowing for a relaxed metal widthover the sense amplifiers, faster sense amplifier operation, and chipsize reduction. The through-holes for the mesh system are located in thecell array instead of, or in addition to, being located in the area ofthe sense amplifier circuits. This utilizes the available space forthrough-holes in the array, and allows for more efficient use of powerand signal buses in the sense amplifiers.

[0011] The invention includes an array of DRAM memory cells, arranged asa plurality of subarrays and selected by main address decoders. Eachsubarray is surrounded by a plurality of sense amplifiers circuits,subdecoder circuits, and V_(DD), V_(SS) and signal buses connecting toand running across the subarray. The V_(DD) buses run in both verticaland horizontal directions across the subarray, with all the verticalbuses lying in the third metal layer and all the horizontal buses lyingin the second metal layer, thereby creating a V_(DD) mesh. The buses ineach layer are connected to each other using through-holes located inthe memory cell subarray as well as on the sense amplifier area.Likewise, a V_(SS) mesh and/or a signal mesh is created usingthrough-holes located on the memory cell subarray. Once connected, thebuses extend to the appropriate circuits, such as sense amplifier drivecircuits, and the metal layer and through-hole requirement over thesense amplifiers is significantly reduced.

[0012] The invention also includes a hierarchical word line scheme. Tofacilitate the combination of the above-mentioned meshed system and thehierarchical word line scheme, the Noda hierarchical word line schemeshould also be improved to provide a greater pitch of main word lines tosubword lines. In the improved hierarchical word line system, anintersection area, created between the sense amplifier and thesubdecoder, includes subdecoder drivers as well as sense amplifierdrivers. This combination provides high speed word line selection andhigh speed sense amplifier operation at the same time.

[0013] Once the sense amplifier size is no longer determined by themetal usage, as provided by the above-mentioned meshed system, animproved layout technique for the sense amplifier circuits may benecessary to match the fine memory cell size. This improved layouttechnique includes an alternating T-shaped gate region for a bit lineequalization circuit and an H-shaped moat region with ametal-to-polysilicon-to-metal change structure for a latch circuit.

[0014] A technical advantage achieved with the invention is the abilityto fully utilize the low resistance design of a meshed power systemwithout having to increase the size of the peripheral circuits, forexample, sense amplifiers, that are limited in size by their metallayers.

[0015] A further technical advantage achieved with the invention is thatboth signal and power buses may freely run in both horizontal andvertical directions.

[0016] A further technical advantage achieved with the invention is thatthe design for through-holes located in the array area or on a stepdifference compensation area do not have to be made to the minimumdesign widths like the through-holes located in the peripheral area, andtherefore the yield is improved.

[0017] A further technical advantage achieved with the invention is thatthe improved hierarchical word line structures are smaller and fasterthan conventional hierarchical word line structures.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018]FIG. 1 is a block diagram of a 256 Mbit DRAM embodying features ofthe present invention.

[0019]FIG. 2 is a block diagram of two subarrays and surrounding senseamplifiers and subdecoders of the DRAM of FIG. 1.

[0020]FIG. 3 is a block diagram of one subarray, two sense amplifiers,and a subdecoder, as shown in FIG. 2, and a meshed power and signalsystem running across the subarray.

[0021]FIG. 4 is a schematic diagram of a meshed power and signal systemover the subarray of FIG. 3.

[0022]FIG. 5a is a cross sectional view of a memory cell of the subarrayof FIG. 3 with a through-hole connecting two metal layers used in themeshed power system of FIG. 4.

[0023]FIG. 5b is a detailed schematic of a memory cell of the subarrayof FIG. 3.

[0024]FIGS. 6a-6 c are layout diagrams of expanded sections of themeshed system of FIG. 4.

[0025]FIGS. 7a-b are schematic diagrams of circuits included in theintersection area, sense amplifier, subdecoder and memory array of FIG.3.

[0026]FIG. 8 is a diagram of the subdecoder circuits of FIG. 7.

[0027]FIG. 9a is a schematic diagram of a prior art subdecoder circuitshowing the Noda hierarchical word line implementation.

[0028]FIG. 9b is a schematic diagram of one subdecoder circuit showing ahierarchical word line implementation.

[0029]FIG. 9c is a schematic diagram of a preferred subdecoder circuitshowing a hierarchical word line implementation of the presentinvention.

[0030]FIG. 10a is a schematic diagram of the two sense amplifiercircuits of FIG. 7a.

[0031]FIG. 10b is a layout diagram of the sense amplifier circuits ofFIG. 10a.

[0032]FIG. 11a is a layout diagram of a circuit used in an equalizersection of a conventional sense amplifier.

[0033]FIG. 11b is a layout diagram of a circuit used in the equalizersection of the sense amplifier circuit of FIG. 7a, utilizing analternate T-shaped gate region of the present invention.

[0034]FIG. 12a is a layout diagram of a circuit used in the latchsection of the sense amplifier circuit of FIG. 7a, utilizing theH-shaped moat region of FIG. 10b.

[0035]FIG. 12b is a simplified diagram of the H-shaped moat region ofFIG. 12a.

[0036]FIG. 13a is a metal layout diagram of a section of a conventionalsense amplifier.

[0037]FIGS. 13b-c are metal layout diagrams of an improved section ofthe sense amplifier of FIG. 7a, implementing a noise decreasing methodof the present invention.

[0038]FIG. 14a is a first cross sectional view of a sense amplifierusing a triple well structure.

[0039]FIG. 14b is a second cross sectional view of the sense amplifierof FIG. 2, using a triple well structure.

[0040]FIG. 14c is a cross sectional view of the subdecoder of FIG. 2using a triple well structure.

[0041]FIG. 15a is a block diagram showing four fuses used for the senseamplifiers of FIG. 2 and two additional sense amplifiers.

[0042]FIG. 15b is a schematic diagram showing four fuses used for thesense amplifiers of FIG. 2 and two additional sense amplifiers.

DETAILED DESCRIPTION OF THE INVENTION

[0043] In FIG. 1 the reference numeral 10 refers to a memory deviceembodying features of the present invention. The device 10 is fabricatedusing a conventional CMOS technology, including first, second and thirdmetal layers and a polysilicon layer. The device 10 also utilizes metaloxide semiconductor field effect transistors (MOSFETs), but other typesof transistors may also be used, such as bipolar, and metal insulatorsemiconductors. Furthermore, while in a preferred embodiment of theinvention, the device 10 is a 256 Mbit dynamic random access memory(DRAM), it should be understood that the present invention is notlimited to use with a 256 Mbit DRAM, but may be used in conjunction withother devices having arrays, including a programmable array logic, a 1Gbit DRAM and other memory devices.

[0044] The device 10 includes a set of array blocks of memory cells,such as an array block 12, a group of pads 14 a-14 f, and a group ofmain address decoders 16 a-16 l, wherein decoders 16 b, 16 e, 16 h and16 k are row decoders and decoders 16 a, 16 c, 16 d, 16 f, 16 g, 16 i,16 j and 16 l are column decoders. The array block 12 is selected bysignals from the address pads 14 a-14 d. It should be understood thatwhile more address and signal pads exist, they may be represented byaddress pads 14 a-14 d, which are decoded by main address decoders 16a-16 l. The main address decoders 16 a-16 l represent a plurality of rowand column decoders. The row decoders generate signals includingmain-word signals MWB and subdecoder control signals DXB, and the columndecoders generate signals such as column select signals YS. Thesesignals are controlled by different address signals from the addresspads 14 a-14 d, as discussed in greater detail below.

[0045] Array block 12, which is representative of the 16 Mbit arrayblocks, is further divided into 256 subarrays, two of which are shown inFIG. 2, and are respectively designated by reference numerals 18 a and18 b. Each subarray consists of 128K of memory cells (arranged as 512rows by 256 columns).

[0046] Power is supplied to the device 10 through power pads 14 e and 14f. The pad 14 e is the positive supply voltage (V_(DD)) power pad and isconnected to an external power supply (not shown). The pad 14 f is thenegative supply voltage (V_(SS)) power pad and is connected to anexternal ground (also not shown).

[0047] Referring to FIG. 2, the memory cells of the subarray 18 a areselected by signals from two groups of address subdecoders 20 a and 20b. Likewise, the memory cells of the subarray 18 b are selected bysignals from two groups of address subdecoders 20 c and 20 d. The memorycells of subarray 18 a are read by two groups of sense amplifiers 22 aand 22 b. Likewise, the memory cells of subarray 18 b are read by twogroups of sense amplifiers 22 b and 22 c. The sense amplifiers 22 a-22 cintersect with the subdecoders 20 a-20 d, at intersection areas 24 a-24f. In this way, intersection areas 24 a-24 f are created by theextension of sense amplifier areas 22 a-22 c and subdecoder areas 20a-20 d.

[0048] Referring to FIG. 3, the pads 14 e and 14 f act as electricalports to supply power to the entire device 10 through main V_(DD) andV_(SS) power buses 28 and 26, respectively. The main V_(DD) and V_(SS)power buses 28 and 26 supply power to the device 10 through a pluralityof buses, located in different metal layers. The metal layers arelayered onto a silicon substrate, in the order of: a first metal layer(M1), a second metal layer (M2), and a third metal layer (M3). Each ofthe metal layers M1, M2, M3 is electrically isolated from each other,but may be electrically interconnected at intersection points usingthrough-holes. Each metal layer M1, M2, M3 also has associated therewitha thickness such that the thickness for M3 is greater than the thicknessfor M2, which is greater than the thickness for M1.

[0049] A first V_(DD) bus 30, comprising a conductor constructed in thethird metal layer M3, extends in a vertical path across the subarray 18a. A first V_(SS) bus 32, also a conductor constructed in M3, extends ina vertical path across the memory subarray 18 a, parallel with the bus30. Similarly, a first signal bus 34 and a first column select YS bus35, conductors constructed in M3, run vertically across the subarray 18a parallel with power buses 30 and 32. A first subdecoder DXB bus 36,also a conductor constructed in M3, runs vertically across addresssubdecoder 20 a, outside of the subarray 18 a.

[0050] A second V_(DD) bus 37 a, a second V_(SS) bus 37 b and a secondsignal bus 37 c, conductors constructed in M3, run vertically across thesubdecoder 20 a and the intersection areas 24 a and 24 b. The secondV_(DD) bus 37 a and the second V_(SS) bus 37 b have a width that is lessthan a width of the first V_(DD) bus 30 and the first V_(SS) bus 32,respectively.

[0051] A third V_(DD) bus 38 and a third V_(SS) bus 40, along with athird signal bus 42 and a second DXB bus 44, are also conductors similarto those described above, except that they are constructed in the secondmetal layer M2, and extend in parallel, horizontal paths across thememory subarray 18 a. The third V_(DD) bus 38 electrically connects withthe second V_(DD) bus 37 a within the subdecoder 20 a at theirintersection point 45 over the peripheral circuit area 20 a and thefirst V_(DD) bus 30 at their intersection point 46 within the memorysubarray 18 a. Likewise, the third V_(SS) bus 40 electrically connectswith the second V_(SS) bus 37 b at their intersection point 47 withinthe subdecoder 20 a and the first V_(SS) bus 32 at their intersectionpoint 48 within the memory subarray 18 a. Furthermore, the third signalbus 42 electrically connects with the second signal bus 37 c at theirintersection point 49 within the subdecoder 20 a and the first signalbus 34 at their intersection point 50 within the memory subarray 18 a.Finally, the second DXB bus 44 electrically connects with the first DXBbus 36 at their intersection point 52 in the subdecoder circuit 20 a.Each of the intersection points is achieved using through-holes, asdiscussed in greater detail with reference to FIGS. 5a-6 c.

[0052] Associated with each bus is a line width, it being understoodthat a bus with a larger surface area (width and thickness) provides alower resistance current path. The first V_(DD) and V_(SS) bus 30, 32have a line width of 1.8 microns. The second V_(DD) and V_(SS) bus 37 a,37 b have a line width of 0.7 microns. The third V_(DD) and V_(SS) bus38, 40 have a line width of 1.8 microns. Likewise, the through-holeshave associated therewith a diameter, it being understood that athrough-hole with a larger surface area (diameter) provides a lowerresistance current path. The through-holes located above the memorysubarray 18 a have a diameter of 0.6 microns, while the through-holeslocated above the subdecoder circuit 20 a have a diameter of 0.8microns.

[0053] V_(DD) and V_(SS) power is supplied through the external pads 14e and 14 f the main power buses 28 and 26, respectively, as previouslydescribed in FIG. 3. The first V_(DD) bus 30 is electrically connectedto the main V_(DD) power bus 28 thereby supplying V_(DD) power to thefirst V_(DD) bus, the second V_(DD) bus 37 a, and the third V_(DD) bus38. The first V_(SS) bus 32 is electrically connected to the main V_(SS)power bus 26 thereby supplying V_(SS) power to the first V_(SS) bus, thesecond V_(SS) bus 37 b, and the third V_(SS) bus 40. In this manner, aV_(DD) mesh 54 is created by the V_(DD) buses 30, 37 a and 38 and aV_(SS) mesh 56 is created by the V_(SS) buses 32, 37 b and 40. As aresult, each of the foregoing meshes have power buses running bothvertically and horizontally across the subarray 18 a, the subdecoder 20a and the intersection areas 24 a-24 b. Furthermore, the V_(DD) andV_(SS) meshes 54 and 56 significantly reduce the total power busresistance from the power pads 14 e and 14 f to the subdecoder 20 a, theintersection areas 24 a-24 b and other circuits, even when the widths ofthe V_(DD) and V_(SS) buses 37 a and 37 b are narrow.

[0054] A first peripheral circuit (not shown) drives electrical signalsto the first signal bus 34 and the column decoder 16 a (FIG. 1) driveselectrical signals to the YS bus 35, which is used in sense amplifiers22 a and 22 b. Likewise, main address decoder 16 b (FIG. 1) driveselectrical signals to the second DXB bus 44, in a conventional manner.The first signal bus 34 electrically connects with the second signal bus37 c and the third signal bus 42 thereby creating a signal mesh 58across the subarray 18 a and the subdecoder 20 a. Likewise, the firstDXB bus 36 electrically connects with the second DXB bus 44 therebycreating a subdecoder mesh 60 across the subdecoder 20 a. In thismanner, the signal and subdecoder meshes 58 and 60 are able to connectthe sense amplifiers 22 a-22 b, the subdecoder 20 a, and theintersection areas 24 a-24 b in many different combinations. Althoughnot shown, there are many additional buses constructed in M2 andextending horizontally across the sense amplifier circuit areas 22 a and22 b. Some of these buses are connected to other signal buses, such asthe YS bus 35.

[0055] Referring to FIG. 4, the V_(DD), V_(SS), signal and subdecodermeshes 54, 56, 58 and 60 actually represent many vertical and horizontallines for each mesh, thereby providing more buses for the surroundingcircuits, and decreasing the resistance of each mesh. For example, thesubarray 18 a has multiple V_(DD) buses 38 a-38 d running in M2 andmultiple V_(DD) buses 30 a-30 d running in M3, all tied to the mainV_(DD) bus 28 (FIG. 3), thereby decreasing the overall resistance of theV_(DD) mesh 54. Likewise, the subarray 18 a has multiple V_(SS) buses 40a-40 d running in M2 and multiple V_(SS) buses 32 a-32 d running in M3,all tied to the main V_(SS) bus 26 (FIG. 3), thereby decreasing theoverall resistance of the V_(SS) mesh 56.

[0056] In addition to the V_(DD), V_(SS), signal and subdecoder meshes54, 56, 58 and 60, other buses run across the subarray 18 a. These otherbuses include multiple column factor (CF) buses 61 a-61 d runningvertically in M3, for inputs to the column decoders 16 a, 16 c, 16 d, 16f, 16 g, 16 i, 16 j and 16 l (FIG. 2), and multiple subdecoder buses(DXB1, DXB3, DXB5, DXB7) 44 a-44 d running horizontally in M2, forconnection to the subdecoder circuits 20 a and 20 b (FIG. 2) and to thefirst DXB bus 36. Furthermore, as shown in FIG. 4, power buses 30 a-30d, 32 a-32 d, 38 a-38 d, 40 a-40 d are located near an outer edge of thesubarray 18 a than the signal buses 61 a-61 d, 44 a-44 d. As a result,resistance of the power buses is reduced, while the resistance for thesignal buses, all grouped toward the interior edge of the subarray 18 a,are relatively consistent with each other, thereby making signalpropagation through the signal buses relatively consistent.

[0057] Referring to FIG. 5a, the electrical connections between thebuses shown in FIG. 4 are made at intersection points located abovememory cells. An intersection point 48 a denotes where the V_(SS) bus 32b crosses the V_(SS) bus 40 b. An electrical connection is made betweenthe V_(SS) bus 32 b and the V_(SS) bus 40 b using a through-hole 62,located above a memory cell circuit 64. Referring to FIGS. 5a-5 b, thememory cell circuit 64 of the subarray 18 a comprises a conventional,one capacitor and one transistor type DRAM cell. For example, acapacitor 65 is formed between a plate 67 and a storage node 68.Likewise, a transistor 69 is formed with the source and drain connectedto the storage node 68 and a bit line (BL1) bus 70, respectively, andthe gate connected to a first subword line (SW) bus 72 a, having a width74. To avoid any coupling noise caused by the power and signal buses,the cell structure of the preferred embodiment is a capacitor on bitline (COB) structure. This structure facilitates the sensitive nature ofthe BL1 bus 70 and enables operation without any detrimental effect bynoise from the power and signal meshes 54, 56 and 58 located over thecell, due to the shielding affect of the plate 64.

[0058] Although the intersection point 48 a appears to be locateddirectly over the memory cell circuit 64, this is not required, and isonly for the benefit of explanation. Furthermore, the through-hole 62and V_(SS) buses 32 b and 40 b are not necessary for memory cell 64 andnot all of the power and signal buses will be connected to other buses.

[0059] Referring to FIGS. 4 and 6a, a first section 76 gives an expandedview of the subarray 18 a, showing more signal lines located between thebuses shown in FIG. 4. Section 76 has several signal and power buses ofvarious widths running both vertically and horizontally across it. Thesebuses include YS buses 35 a-35 d, having a width 80, the CF bus 61 a,having a width 82, and the V_(SS) bus 32 b, having a width 84, runningvertically in M3. Likewise, MWB buses 86 a-86 d, having a width 88, theDXB1 bus 44 a, having a width 90 and the V_(SS) bus 40 b, having a width92, run horizontally in M2. The signal buses YS 35 a-35 d, CF 61 a, MWB86 and DXB1 44 a run directly to their corresponding circuits, andtherefore do not require a through-hole on the subarray 18 a to changedirections. Only the V_(SS) buses 32 b and 40 b have a through-hole 62to electrically connect them. With this arrangement, the width of eachbus, 80, 82, 84, 88, 90 and 92, is optimized for speed and powerresistance effect. For example the widths 84 and 92 of the V_(SS) buses32 b and 40 b, the width 82 of the CF bus 61 a, and the width 90 of theDXB1 bus 44 a are wider than the widths 80 and 88 for high speed and lowpower resistance, and to accommodate the through-hole 62. Meanwhile, thewidth 80 of the YS buses 35 and the width 88 of the MWB buses 86, aremade narrower than the widths 82, 84, 90, 92 to conserve metal space.

[0060] Likewise, referring to FIGS. 6b and 6 c, sections 94 and 96 areshown, having two and no through-holes, respectively. As a result, twoYS buses and one CF bus (or two YS buses and one power bus) are createdwith every four sense amplifier circuits, while still meeting acceptableM3 width and space requirements. Likewise, two MWB buses and one DXB bus(or two MWB buses and one power bus) are placed with every sixteensub-word-line SW buses, while still meeting acceptable M2 width andspace requirements. In addition, the widths of all the power and signalbuses may be optimized to accommodate the multiple buses used by eachmesh for reducing effective resistance and for achieving high speed,keeping the essential advantage of high yield by having the relaxedmetal pitch of hierarchical word-line configuration.

[0061] Referring again to FIG. 3, in addition to the power and signalmeshes 54, 56, and 58 being constructed over the subarray 18 a, they arepartially constructed over the subdecoder 20 a, along with thesubdecoder mesh 60. Other circuits are modified to accommodate the metalspace needed by the power and signal meshes 54, 56, 58 and 60. Themodified circuits are included in the sense amplifiers, the subdecodersand the intersection areas, as described below.

[0062]FIGS. 7a and 7 b illustrate the subarray 18 a comprising 32representative memory cells including the memory cell 64 of FIGS. 5a-b.Furthermore, the subarray 18 a is shown in relation to the intersectionarea 24 a, the subdecoder 20 a, and the sense amplifier 22 a of FIG. 2.

[0063] In the preferred embodiment, the sense amplifier 22 a includes128 sense amplifier circuits, such as sense amplifier circuits 98 a and98 b. Both of the sense amplifier circuits 98 a-98 b are connected to asense amplifier driver 100 a, which is located in the intersection area24 a. The sense amplifier circuit 98 a is connected to a column ofmemory cells 102 a, through the BL1 bus 70 (FIG. 5a) and a bit line(BL1B) bus 104 a, which are both constructed in M1, and run verticallyacross the array 18 a. Likewise, the sense amplifier circuit 98 b isconnected to a column of memory cells 102 b, through a bit line (BL2)bus 104 b and a bit line (BL2B) bus 104 c, which are also constructed inM1, and run vertically across the array 18 a. Sense amplifier circuits98 a-98 b are discussed in greater detail with reference to FIGS. 10a-10b, below.

[0064] In addition to the sense amplifier driver 100 a, the intersectionarea 24 a includes a plurality of circuits (excluding sense amplifierdriver 100 a and subdecoder drivers 110 a-110 d) which are referencedgenerally by the numeral 100 b. These circuits 100 a-100 b are designedto employ the advantages of the low resistance of the V_(DD), V_(SS) andsignal meshes 54, 56 and 58, as supplied by the buses 37 a-37 c.

[0065] The subdecoder 20 a includes 256 subdecoder circuits, representedgenerally be subdecoder circuit 106 a-106 d. The subdecoder circuit 106a illustrates a hierarchical word line structure utilized in each of theremaining subdecoder circuits. The subdecoder circuit 106 a is connectedto the DXB7 bus 44 d and the MWB bus 86 a, which is routed to the foursubdecoder circuits 106 a-106 d through a connector bus 108, constructedin M1. The subdecoder circuit 106 a is also connected to a firstsubdecoder driver 110 a, located in the intersection area 24 a, alongwith the sense amplifier driver 100. Likewise subdecoder circuits 106b-106 d are connected to subdecoder drivers 110 b-110 d, located in theintersection areas. The subdecoder 20 a is discussed with more detailbelow.

[0066] Referring to FIG. 8, two subdecoder drivers 110 a-110 d arelocated in intersection area 24 a, while the other two subdecoderdrivers 110 b-110 c are located in the intersection area 24 b. Thesubdecoder driver 110 a comprises an inverter, which converts the DXB7bus 44 d, to an inverted subdecoder (DX7) bus 114 d. Likewise, thesubdecoder drivers 110 b-d convert the DXB1 44 a, DXB3 44 b and DXB5 44c to inverted subdecoder buses DX1 114 a, DX3 114 b and DX5 114 c. Inthe preferred embodiment, each of the subdecoder drivers 110 a-110 ddrive 64 subdecoder circuits, thereby driving all 256 of the subdecoder20 a. Being located in the intersection areas 24 a-24 b, the subdecoderdrivers 110 a-110 d are made of significant size, and are supplied aninternally generated boosted voltage (V_(PP)) so that the buses DX11 114a, DX3 114 b, DX5 114 c and DX7 114 d can be driven to V_(PP).

[0067] The subdecoder circuits 106 a et seq. employ a hierarchical wordline structure. As discussed earlier, the subdecoder circuits formed inthe subdecoder area 20 a and 20 b are used to select certain memorycells in the subarray 18 a. This is accomplished by utilizing aplurality of subword lines, such as the line 72 a, constructed in thepolysilicon (FG) layer (FIG. 5a). The MWB bus 86 a drives foursubdecoder circuits 106 a-106 d of subdecoder are 20 a, which each drivea SW bus 72 a-72 d, extending into the subarray 18 a. Likewise, the MWBbus 86 a drives four additional subdecoder circuits 106 e-106 h ofsubdecoder area 20 b, which each drive a SW bus 72 e-72 h, extendinginto the subarray 18 a.

[0068] Referring to FIGS. 9a-9 b, a conventional subdecoder circuit 116and an alternative subdecoder circuit 118 implement a hierarchical wordline structure. The structures are hierarchical due to the placement ofmain word line buses, constructed in M2, over a subword line buses,constructed in FG. However, the subdecoder circuits 116, 118 do notfacilitate the meshed system of the present invention.

[0069] Referring to FIG. 9a, the conventional subdecoder circuit 116, asused in the Noda hierarchical word line structure scheme, consists ofthree n-type metal oxide semiconductor (NMOS) transistors and producesan SW output. However, the subdecoder circuit 116 requires anon-inverted word line (MW) bus, which must also run across the array(not shown) along with a MWB bus. This effectively doubles the number ofmain word lines running in M2 across the array. As a result, two mainword lines are used to drive eight subword lines, thereby creating apitch of 4 subword lines to every main word line. This pitch, however,does not allow the extra metal space needed for the meshed system of thepresent invention.

[0070] Referring to FIG. 9b, the subdecoder circuit 118 consists of twoNMOS transistors and two p-type metal oxide semiconductor (PMOS)transistors. The subdecoder driver does not require a non-inverted wordline bus (MW) as in FIG. 9a. As a result, one main word line is used todrive eight subword lines, thereby creating a pitch of 8 subword linesto every main word line. But, since the subdecoder circuit consists offour transistors, it thereby consumes a lot of space, and to speed thecircuit up, some of the transistors must be made very large.

[0071] Referring to FIG. 9c, the subdecoder circuit 106 a of thepreferred embodiment comprises the advantages of the above twosubdecoder drivers. The subdecoder circuit 106 a uses the MWB bus 86 a,the DXB7 bus 44 d, and the DX7 bus 114 d to produce the subword line SWbus 72 a, thereby allowing the subdecoder circuit 106 a to beconstructed with only three transistors 120 a-120 c. Since the DX7 bus114 d runs only in the subdecoder 20 a, and does not have to runhorizontally across the array, the main word line pitch across thesubarray 18 a remains at eight subword lines for every main word line.As a result, there is sufficient metal space for the power, signal andsubdecoder meshes 54, 56, 58 and 60, and the DXB bus 44 (FIG. 3) of thepresent invention.

[0072] In operation, the signals on the MWB bus 86 a and DXB7 bus 44 d,designated as MWB and DXB7, are negative logic signals, i.e. they arehigh in the standby mode, low in an enable mode. When the signals MWBand DXB7 are both low, an output signal on the subword line SW bus 72 ais driven to a selective high level. When only one of the signals MWB orDXB7 is high, the output signal on the subword line SW bus 72 a isdriven to a non-selective low level. In the standby or precharge mode,i.e., when all of the MWB and DXB signals are high, all subword lines SWare set to low.

[0073] An advantage of the subdecoder circuit 106 a is that asubthreshold current in the row decoders and DXB drivers is primarilydetermined by NMOS transistors 120 a, 120 b. As a result, a low standbycurrent is achieved during standby or precharge mode. This is because agate with for the NMOS transistors 120 a, 120 b can be narrower thanthat of PMOS transistors, and NMOS transistor cutoff-transitioncharacteristics are sharper than that of PMOS transistors.

[0074] Other advantages of the subdecoder circuit 106 a are that thesubdecoder circuit 106 a provides extra metal space for the power,signal and subdecoder meshes 54, 56, 58 and 60, and the subdecodercircuit 106 a improves in speed performance. The speed of the subdecodercircuit 106 a is directly proportional to the ability of the DX7 bus 114d to transition from low to high. Since the DX7 bus 114 a is driven bythe subdecoder driver 110 a, and since the subdecoder driver is locatedin the non-crowded intersection area 24 a, it can be made of sufficientsize. Furthermore, the DX7 bus 114 a is constructed in M3, which has thelowest resistance of the three metal layers. Thus, the DX7 bus 114 aproduces a sharp rising wave form, thereby achieving high speedactivation of the SW bus 72 a. In the preferred embodiment, a gate width(not shown) of the NMOS transistor 120 b of is narrower than that of agate width (also not shown) of the NMOS transistor 120 a, therebyimproving speed and layout area optimization. For example, in thepreferred embodiment, the gate widths of transistors 120 a and 102 b are2.2 microns and 1 micron, respectively. The narrow gate width oftransistor 120 b contributes to smaller load capacitance and faster falltimes for signals on the DXB bus 44 d. As a result, the DX bus 114 dachieves faster rise times. In addition, the gate width of 120 a is setto the sufficient value for falling speed of the subword line SW.

[0075] Referring to FIG. 10a, the sense amplifier circuit 98 a comprisesa latch section 122 a and an equalizer section 124 a. The latch section122 a comprises two NMOS transistors 126 a-126 b, connected between thebit line buses 70 and 104 a and a first latch bus 128. The latch section122 a also comprises two PMOS transistors 130 a-130 b connected betweenthe bit line buses 70 and 104 a and a second latch bus 132. All fourtransistors 126 a, 126 b, 130 a, 130 b are cross-coupled in aconventional latching manner for storing signals from the bit line buses70 and 104 a.

[0076] The equalizer section 124 a includes three NMOS transistors 134a-134 c for equalizing the BL1 bus 70 and the BL1B bus 104 a during thestandby or pre-charge modes. The three transistors 134 a-134 c arecontrolled by an equalization bus 136.

[0077] In a similar manner, the sense amplifier circuit 98 b comprises alatch section 122 b and an equalizer section 124 b connected to the bitline buses 104 b-104 c. The latch section 122 b and the equalizersection 124 b are also connected to the two latch buses 128, 132 and theequalization bus 136, respectively.

[0078] Referring to FIG. 10b, a further reduction in the size of thesense amplifier 22 a is achieved by other layout improvements. Theequalizer sections 124 a and 124 b are constructed in shapes ofalternating “T's” as discussed in greater detail below with reference toFIG. 11a. The latch sections 122 a and 122 b are constructed utilizing“H” shaped moat regions, as discussed in greater detail below withreference to FIG. 12a-b.

[0079] Referring to FIGS. 11a-11 b, to reduce the size constraints ofthe equalizer section 124 a caused by the transistors 134 a-134 c, aT-shaped gate region 138 a (FIG. 11a) is utilized. The equalizer signalbus 136 creates a gate for each of the transistors 134 a-134 c. In asimilar manner, the equalizer section 124 b utilizes an invertedT-shaped gate region 138 b. As a result, the gate regions 138 a, 138 bcan be compacted together, while still maintaining a required moatisolation distance 137 between the gate regions 138 a, 138 b. In sodoing, a width 140 of the two gate regions is smaller than aconventional width 142 of two square gate regions 144 a and 144 b, asshown in FIG. 11b, and a small sense amplifier circuit 22 a correspondsto the small memory cell circuit 64 (FIG. 5a).

[0080] Referring to FIG. 12a, the sense amplifier 22 a also comprises anH-shaped moat 146. The BL1 bus 70, constructed in M1, must cross theBL1B bus 104 a, also constructed in M1, at the H-shaped moat 146 withoutelectrically intersecting. Furthermore, the BL1 bus 70 must drive atransistor gate 148 a and the BL1B bus 104 a must drive a transistorgate 148 b. At a crossing point 150, the BL1B bus 104 a is connected tothe transistor gate 148 b, constructed in FG, which runs under the metallayers. The gate 148 b not only serves to allow the BL1B bus 104 a tocross the BL1 bus 70, but it is the gate for the transistor 130 b. Aftercrossing the BL1 bus 70, the gate 148 b is reconnected to a connectingbus 152, also constructed in M1, thereby electrically connecting theBL1B bus 104 a to the connecting bus 152. Similarly, the BL2 bus 104 band the BL2B 104 c bus also cross in the H-shaped moat 146.

[0081] Referring to FIG. 12b, these connections create an M1 to FG to M1change and construct the two PMOS transistors 130 a-130 b. Not only doesthis change provide a size reduction, it does so without using anadditional metal layer.

[0082] Furthermore, the H-shaped moat 146 solves another problemassociated with the meshed system, that is, noise on the bit line buses70 and 104 a-104 c. Noise at the sense amplifiers 22 a-22 c is oftencaused by signal buses constructed in M3 overlapping the bit line buses70 and 104 a-c constructed in M1. Since the bit line buses 70 and 104 ado a crossing pattern, any noise or capacitive coupling induced fromsignal buses constructed in M3, such as the CF bus or the YS bus, willbe the same for both the BL1 bus 70 and the BL1B bus 104 a, therebyeffectively canceling the effect of noise. Likewise, any noise will bethe same for the BL2 bus 104 b and the BL2B bus 104 c.

[0083] Referring to FIG. 13a, addition noise protection from signalbuses constructed in M3 overlapping the bit line buses 70 and 104 a-cconstructed in M1 can be reduced through M2 shielding. For example, inconventional prior art designs having first and second buses 154 a-154 bconstructed in M1 and running in a vertical direction, and having athird bus 154 c constructed in M3 which also running in a verticaldirection, noise is aggravated. Noise is induced from the third bus 154c to the first and second buses 154 a and 154 b, since they overlap andrun in the same direction, allowing the noise to be strengthened by thelarge area of overlap. This conventional design can be a problem,especially when the buses 154 a, 154 b are particularly sensitive tonoise, such as the bit line buses 70 and 104 a of the present invention.Furthermore, in the conventional design, a group of other buses 156a-156 d constructed in M2 and running in a horizontal direction havelittle to no shielding effect, as shown.

[0084] Referring to FIGS. 13b-13 c, the preferred embodiment reduces thenoise between buses running in the same direction by improving theshielding effect of the M2 buses. In the preferred embodiment, the BL1bus 70 and the BL1B bus 104 a are constructed in M1 and run in thevertical direction. Furthermore, the CF bus 61 a is constructed in M3and runs in the vertical direction, just above the two bit line buses 70and 104 a. Located between the CF bus 61 a and the bit line buses 70 and104 a are four buses 158 a-158 d constructed in M2 and running in thehorizontal directions.

[0085] Referring to FIG. 13b, one technique for reducing noise is usedin a situation where the M2 buses 158 a and 158 d are noisy, activelines, such as parts of the sense amplifiers, and the M2 buses 158 b-care inactive, quiet buses, such as a power supply bus, a first techniqueis used. Instead of having some of the M2 buses 158 a-158 d onlyextending across one of the bit line buses 70 and 104 a, as shown inFIG. 13a, the M2 buses 158 b-158 c now extend over both bit line buses.In this manner, the M2 buses 158 a-158 d provide more of a shieldingaffect from any noise from the CF bus 61 a.

[0086] Referring to FIG. 13c, in a situation where two of the M2 buses158 a and 158 d are inactive, quiet buses, such as a power supply bus,and the other two of the M2 buses 158 b, 158 c are active, noisy buses,a second technique is used. In this case, the bit line buses 70 and 104a are better shielded from the noise of the CF bus 61 a by the quiet M2buses 158 a, 158 d. Therefore, the quiet M2 buses 158 a, 158 d are drawnas large as possible, thereby maximizing their shielding affect.

[0087] Referring to FIG. 14a, the well structure of the sense amplifiercan also be size determinative, especially in a situation like thepreferred invention where power and signal meshes are utilized. In afirst design, a triple well structure 160 comprising a p well (PW) 162a, a deep well (DW) 164 a and a p-substrate (P-Sub) 166 is used fornoise protection from a sense amplifier circuit 170 to a subarray 168 a.Likewise, the triple well structure 160 comprises a p well (PW) 162 b, adeep n-type well (DW) 164 b and the P-Sub 166 for noise protection froma sense amplifier circuit 170 to a subarray 168 b. Although the wells162 a, 162 b, 164 a, 164 b and substrate 166 may have various biasarrangements, one such arrangement provides: TABLE 1 Well Bias Name BiasVoltage PW over DW VBBA 167a −1 V NW over DW VPP 167b 4.0 V DW VPP 167b4.0 V P-Sub VBB 167c 0 V PW (not over DW) VBB 167c 0 V NW (not over DW)VDD 167d 3.3 V

[0088] It is noted that well biasing is well known in the art, and anydescriptions of bias voltage are merely illustrative, and should not belimited to such in any manner.

[0089] The subarrays 168 a and 168 b are isolated from the noisy effectsof the sense amplifiers 170 by two isolation n wells (NWs) 170 a and 172b, respectively. The NWs 172 a, 172 b create separation transistors forsharing one sense amplifier between memory cell arrays located on eitherside. A negative bias voltage that is suitable for device isolation issupplied to the P-wells 162 s and 162 b, where the above describedseparation transistors and the memory cell transistors are both located.The NWs 172 a, 172 b are biased to V_(PP) 167 b for electricalisolation. Furthermore, the NW's 172 a, 172 b are located above the DWs164 a, 164 b, respectively, and thereby bias the D_(WS) to V_(PP). Thesense amplifier circuit 170 has an additional NW 174, which is biased toV_(DD) 167 d to provide faster operation of a p-type transistor 176. Theadvantage for DWs 164 a, 164 b being biased to V_(PP) is that thesubdecoders are CMOS circuits operating at the V_(PP) voltage level(FIGS. 7a, 7 b, 14 c). On the other hand, because PMOS transistors ofthe sense amplifier circuit 170 operate at or below the V_(DD) voltagelevel, the V_(DD) voltage level is suitable as a bias voltage for the NW174, instead of the V_(PP) voltage level. The sense amplifier 170 alsohas two PWs 178 a, 178 b, biased to V_(BB) 167 c through the P-sub 166.The PW 178 a supports a transistor 180 a and the PW 178 b supportstransistors 180 b, 180 c.

[0090] Referring to FIG. 14b, the preferred embodiment is able to shrinkthe well structure of the sense amplifier 24 b, as compared to FIG. 14a.The preferred embodiment utilizes a triple well structure 182 comprisinga PW 184 a, a DW 186 a, and a P-Sub 188, for subarray 18 a, and a PW 184b, a DW 186 b, and the P-Sub 188, for subarray 18 b. The subarrays 18a-18 b are thereby protected from the sense amplifier circuit 22 b. Thetriple well structure 182 also uses well-biasing similar to theillustrative biases described in Table 1. It is noted, however, thatwell biasing is well known in the art, and any descriptions of biasvoltage are merely illustrative, and should not be limited to such inany manner.

[0091] The subarrays 18 a-18 b are isolated from the noisy effects ofthe sense amplifiers 24 b by two isolation NWs 190 a, 190 b,respectively. The isolation NWs 190 a, 190 b are biased to V_(PP) 167 bfor isolation. Furthermore, the isolation NWs 190 a, 190 b are locatedabove the DWs 186 a-186 b, respectively, and thereby bias the DWs. Thepreferred embodiment differs from the conventional system of FIG. 14a inthat the isolation NW 190 a also supports the transistor 130 d, whichcorresponds with the transistor 176 of FIG. 14a. As a result, thetransistor 130 d will operate slower than the transistor 176 of FIG.14a. However, the speed of the transistor 130 d is not critical to theoverall timing of the sense amplifier circuit 90 a. Therefore, althoughthe PMOS transistor 130 d is using a V_(PP) biased well, there is nooverall speed degradation.

[0092] There is a size advantage, however, to the isolation NW 190 aover the conventional technique described in FIG. 14a. Instead of havingthe NW 170 a for the sole purpose of isolation, and the second NW 174for the transistor 176 (FIG. 14a), the two are combined in the NW 190 aof the preferred embodiment, thereby shrinking the space of the senseamplifier 24 b. Furthermore, a single PW 192 can be used to support thetransistors 134 a-134 c.

[0093] Referring to FIG. 14c, a triple well structure 193 is implementedfor the subdecoder 20 a. The P-Sub 188 and the DW 186 a extendthroughout the subarray 18 a (FIG. 14b), across the subdecoder 20 a, andinto a subarray 196. The PW 184 a is separated from a PW 198 by an NW200, which is biased to V_(PP) 167 b for isolation. By biasing the NW200 at V_(PP) 167 b, the SW bus 72 a can operate at V_(PP).

[0094] Referring to FIGS. 15a and 15 b, the sense amplifier 22 aincludes four fuses 202 a-202 d used for a column redundancy scheme. Thetwo fuses 202 b and 202 d are used to disable sense amplifier circuits98 a-98 b , and the two fuses 202 a and 202 c are used to disable senseamplifier circuits 204 a-204 b. Column redundancy is well known to thoseskilled in the art; however, conventional designs result in a dramaticarea penalty in the sense amplifier design due to the fuse placement.Accordingly, in the preferred embodiment, the fuses 202 a-202 d arelined in parallel with the bit line buses 70 and 104 a, even for thefuses corresponding to sense amplifiers located in a different area. Inthis way, the vertical running CF bus 61 a and the YS buses 35 c-35 dneed to be offset for only one group of fuses, thereby providing themaximum space for the power and signal meshes 54, 56, 58 and 60.

[0095] Although the illustrative embodiment of the present invention hasbeen shown and described, a latitude of modification, change andsubstitution is intended in the foregoing disclosure, and in certaininstances, some features of the invention will be employed without acorresponding use of other features. For example, the horizontal andvertical directions were included to make the preferred embodimentsimpler to describe, but are not intended to limit the presentinvention. Accordingly, it is appropriate that the appended claims beconstrued broadly and in a manner consistent with the scope of theinvention.

What is claimed is:
 1. A semiconductor memory formed on a semiconductorsubstrate comprising; a first memory cell; a second memory cell; a firstword line coupled to said first and second memory cells and formed in afirst conductive layer; a first pair of bit lines; a second pair of bitlines; a first sense amplifier which provides said first pair of bitlines with a pair of complementary signals on the basis of informationof said first memory cell and includes a first pair of MOSFETs, a secondsense amplifier which provides said second pair of bit lines with a pairof complementary signals on the basis of information of said secondmemory cell and includes a second pair of MOSFETS, a third and fourthMOSFETs connected in series between said first pair of bit lines; afifth MOSFET connected between said first pair of bit lines; a sixth anda seventh MOSFETs connected in series between said second pair of bitlines; and a eight MOSFET connected between said second pair of bitlines, wherein said first pair of bit lines crosses each other with asecond conductive layer, wherein said second pair of bit lines crosseseach other with said second conductive layer, wherein said first pair ofMOSFETs and said second pair of MOSFETs are formed in a H-shaped activeregion, wherein said third, fourth and fifth MOSFETS are formed in afirst T-shaped active region, wherein said sixth, seventh and eightMOSFEts are formed in a second T-shaped active region, and wherein saidfirst conductive layer is formed between a surface of said semiconductorsubstrate and said second conductive layer.
 2. A semiconductor memoryaccording to claim 1, wherein said first memory cell has a ninth MOSFETand a first capacitor, wherein said second memory cell has a tenthMOSFET and a second capacitor, wherein plates of said first and secondcapacitors are formed over said first and second pairs of bit lines. 3.A semiconductor memory according to claim 2, wherein said third, fourth,fifth, sixth, seventh and eight MOSFETs have a common gate electrode. 4.A semiconductor memory according to claim 3, further comprising: avoltage supply line formed third conductive layer, wherein said secondconductive layer is formed between said third conductive layer and saidfirst conductive layer.